@inbook{38051,
  author = {Aling and Banerjee and Bangia and Cole and Ebert and EmamiNaeini and Jensen and Kevrekidis and Shvartsman},
  title = {Nonlinear model reduction for simulation and control of Rapid Thermal Processing},
  abstract = { A methodology (based on the Proper Orthogonal Decomposition and Approximate Inertial Manifolds) is proposed for obtaining low order dynamic models of Rapid Thermal Processing (RTP) systems. These nonlinear models are designed to retain the physical understanding of the RTP system dynamics and their dependence on critical parameters, making them an attractive choice for use in developing more advanced and intelligent controllers. },
  year = {1997},
  journal = {Proceedings of the 1997 American Control Conference, Vols 1-6Proceedings of the 1997 American Control Conference, Vols 1-6},
  pages = {2233-2238},
  publisher = {I E E E},
  address = {New York},
  isbn = {0-7803-3833-2},
  language = {English},
}